This Standard specifies the minimum requirements for the design, construction, installation, test and approval of separative devices, in those respects where they differ from cleanrooms as described in JIS B 9919 and JIS B 9917-5.
The application of this Standard takes into account the following limitations. User requirements are as agreed by the customer and the supplier. Application-specific requirements are not addressed.
Specific processes to be accommodated in the separative-device installation are not specified.
Fire, safety and other regulatory matters are not considered specifically; where appropriate, national and local regulations apply.
JIS B 9917-7:2011 規範的参照
ISO 14644-2:2000 クリーンルームおよび関連する管理された環境 パート 2: ISO 14644-1 に継続的に準拠したテストおよびモニタリングの仕様